# Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and <i>H</i>∞ control

> Research article (Review of Scientific Instruments, 2021) · cited 12× · AI/ML

**Wikidata**: [openalex:W3173024619](https://www.wikidata.org/wiki/openalex:W3173024619)  
**Source**: https://4ort.xyz/entity/robust-high-bandwidth-control-of-nano-positioning-stages-with-kalman-filter-based-extended-state-observer-and-i-h-i-cont