# Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm

> Research article (Optics Communications, 2017) · cited 13× · AI/ML

**Wikidata**: [openalex:W2774828718](https://www.wikidata.org/wiki/openalex:W2774828718)  
**Source**: https://4ort.xyz/entity/robust-design-of-broadband-euv-multilayer-using-multi-objective-evolutionary-algorithm