# RL-OPC: Mask Optimization With Deep Reinforcement Learning

> Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023) · cited 18× · AI/ML

**Wikidata**: [openalex:W4386242015](https://www.wikidata.org/wiki/openalex:W4386242015)  
**Source**: https://4ort.xyz/entity/rl-opc-mask-optimization-with-deep-reinforcement-learning