# RF magnetron sputter deposition and electrical properties of La and Y doped SrTiO3 epitaxial films

> Research article (Materials & Design, 2019) · cited 18× · AI/ML

**Wikidata**: [openalex:W2946807402](https://www.wikidata.org/wiki/openalex:W2946807402)  
**Source**: https://4ort.xyz/entity/rf-magnetron-sputter-deposition-and-electrical-properties-of-la-and-y-doped-srtio3-epitaxial-films