# Revisitation of the structure zone model based on the investigation of the structure and properties of Ti, Zr, and Hf thin films deposited at 70–600 °C using DC magnetron sputtering

> Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2018) · cited 14× · AI/ML

**Wikidata**: [openalex:W2811127738](https://www.wikidata.org/wiki/openalex:W2811127738)  
**Source**: https://4ort.xyz/entity/revisitation-of-the-structure-zone-model-based-on-the-investigation-of-the-structure-and-properties-of-ti-zr-and-hf-thin