# Review on macromodels of MEMS sensors and actuators

> Research article (Microsystem Technologies, 2017) · cited 13× · AI/ML

**Wikidata**: [openalex:W2576450068](https://www.wikidata.org/wiki/openalex:W2576450068)  
**Source**: https://4ort.xyz/entity/review-on-macromodels-of-mems-sensors-and-actuators