# Review of Wafer Surface Defect Detection Methods

> Research article (Electronics, 2023) · cited 66× · AI/ML

**Wikidata**: [openalex:W4362734521](https://www.wikidata.org/wiki/openalex:W4362734521)  
**Source**: https://4ort.xyz/entity/review-of-wafer-surface-defect-detection-methods