# Review of surface profile measurement techniques based on optical interferometry

> Research article (Optics and Lasers in Engineering, 2017) · cited 143× · AI/ML

**Wikidata**: [openalex:W2591344055](https://www.wikidata.org/wiki/openalex:W2591344055)  
**Source**: https://4ort.xyz/entity/review-of-surface-profile-measurement-techniques-based-on-optical-interferometry
