# Review: Machine learning for advancing low-temperature plasma modeling and simulation

> Research article (Journal of Micro/Nanopatterning Materials and Metrology, 2023) · cited 25× · AI/ML

**Wikidata**: [openalex:W4390346002](https://www.wikidata.org/wiki/openalex:W4390346002)  
**Source**: https://4ort.xyz/entity/review-machine-learning-for-advancing-low-temperature-plasma-modeling-and-simulation