# Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

> Research article (Japanese Journal of Applied Physics, 2019) · cited 18× · AI/ML

**Wikidata**: [openalex:W2947296241](https://www.wikidata.org/wiki/openalex:W2947296241)  
**Source**: https://4ort.xyz/entity/rethinking-surface-reactions-in-nanoscale-dry-processes-toward-atomic-precision-and-beyond-a-physics-and-chemistry-persp