# Remaining useful life prediction for ion etching machine cooling system using deep recurrent neural network-based approaches

> Research article (Control Engineering Practice, 2021) · cited 37× · AI/ML

**Wikidata**: [openalex:W3126562619](https://www.wikidata.org/wiki/openalex:W3126562619)  
**Source**: https://4ort.xyz/entity/remaining-useful-life-prediction-for-ion-etching-machine-cooling-system-using-deep-recurrent-neural-network-based-approa