# Reliability of electrostatically actuated MEMS resonators to random mass disturbance

> Research article (Mechanical Systems and Signal Processing, 2018) · cited 18× · AI/ML

**Wikidata**: [openalex:W2905563852](https://www.wikidata.org/wiki/openalex:W2905563852)  
**Source**: https://4ort.xyz/entity/reliability-of-electrostatically-actuated-mems-resonators-to-random-mass-disturbance