# Relative importance of various stochastic terms and EUV patterning

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2018) · cited 25× · AI/ML

**Wikidata**: [openalex:W2895587995](https://www.wikidata.org/wiki/openalex:W2895587995)  
**Source**: https://4ort.xyz/entity/relative-importance-of-various-stochastic-terms-and-euv-patterning