# Reference-free evaluation of thin films mass thickness and composition through energy dispersive X-ray spectroscopy

> Research article (Materials Characterization, 2019) · cited 44× · AI/ML

**Wikidata**: [openalex:W2909242282](https://www.wikidata.org/wiki/openalex:W2909242282)  
**Source**: https://4ort.xyz/entity/reference-free-evaluation-of-thin-films-mass-thickness-and-composition-through-energy-dispersive-x-ray-spectroscopy