# Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2017) · cited 27× · AI/ML

**Wikidata**: [openalex:W2756404518](https://www.wikidata.org/wiki/openalex:W2756404518)  
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