# Recurrent Neural-Network-Based Model Predictive Control of a Plasma Etch Process

> Research article (Industrial & Engineering Chemistry Research, 2021) · cited 17× · AI/ML

**Wikidata**: [openalex:W4200302319](https://www.wikidata.org/wiki/openalex:W4200302319)  
**Source**: https://4ort.xyz/entity/recurrent-neural-network-based-model-predictive-control-of-a-plasma-etch-process