# Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

> Research article (Journal of Intelligent Manufacturing, 2018) · cited 70× · AI/ML

**Wikidata**: [openalex:W2884425876](https://www.wikidata.org/wiki/openalex:W2884425876)  
**Source**: https://4ort.xyz/entity/recurrent-feature-incorporated-convolutional-neural-network-for-virtual-metrology-of-the-chemical-mechanical-planarizati