# Reconstructing the three-dimensional latent image of extreme ultraviolet resists with resonant soft x-ray scattering

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2942956122](https://www.wikidata.org/wiki/openalex:W2942956122)  
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