# Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2024) · cited 18× · AI/ML

**Wikidata**: [openalex:W4400062258](https://www.wikidata.org/wiki/openalex:W4400062258)  
**Source**: https://4ort.xyz/entity/recognition-and-classification-of-mixed-defect-pattern-wafer-map-based-on-multi-path-dcnn