# RCA clean

> standard set of wafer cleaning steps which need to be performed before high-temperature processing steps of silicon wafers in semiconductor manufacturing

**Wikidata**: [Q1903370](https://www.wikidata.org/wiki/Q1903370)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/RCA_clean)  
**Source**: https://4ort.xyz/entity/rca-clean