# Rayleigh or Abbe? Origin and naming of the resolution formula of microlithography

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2020) · cited 15× · AI/ML

**Wikidata**: [openalex:W3096560515](https://www.wikidata.org/wiki/openalex:W3096560515)  
**Source**: https://4ort.xyz/entity/rayleigh-or-abbe-origin-and-naming-of-the-resolution-formula-of-microlithography