# Randomized General Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2015) · cited 72× · AI/ML

**Wikidata**: [openalex:W2086362611](https://www.wikidata.org/wiki/openalex:W2086362611)  
**Source**: https://4ort.xyz/entity/randomized-general-regression-network-for-identification-of-defect-patterns-in-semiconductor-wafer-maps