# Quantitative analysis of backscattered electron (BSE) contrast using low voltage scanning electron microscopy (LVSEM) and its application to AlGaN/GaN layers

> Research article (Ultramicroscopy, 2018) · cited 15× · AI/ML

**Wikidata**: [openalex:W2889166079](https://www.wikidata.org/wiki/openalex:W2889166079)  
**Source**: https://4ort.xyz/entity/quantitative-analysis-of-backscattered-electron-bse-contrast-using-low-voltage-scanning-electron-microscopy-lvsem-and-it
