# Proximity correction and resolution enhancement of plasmonic lens lithography far beyond the near field diffraction limit

> Research article (RSC Advances, 2017) · cited 17× · AI/ML

**Wikidata**: [openalex:W2590019362](https://www.wikidata.org/wiki/openalex:W2590019362)  
**Source**: https://4ort.xyz/entity/proximity-correction-and-resolution-enhancement-of-plasmonic-lens-lithography-far-beyond-the-near-field-diffraction-limi