# Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process

> Research article (International Journal of Engineering and Technology, 2015) · cited 74× · AI/ML

**Wikidata**: [openalex:W4255500610](https://www.wikidata.org/wiki/openalex:W4255500610)  
**Source**: https://4ort.xyz/entity/predictive-models-for-equipment-fault-detection-in-the-semiconductor-manufacturing-process