# Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication

> Research article (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W1550126066](https://www.wikidata.org/wiki/openalex:W1550126066)  
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