# Prediction of planarization property in copper film chemical mechanical polishing via response surface methodology and convolutional neural network

> Research article (Nano Select, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3188111229](https://www.wikidata.org/wiki/openalex:W3188111229)  
**Source**: https://4ort.xyz/entity/prediction-of-planarization-property-in-copper-film-chemical-mechanical-polishing-via-response-surface-methodology-and-c