# Practical Fractional-Order Variable-Gain Supertwisting Control With Application to Wafer Stages of Photolithography Systems

> Research article (IEEE/ASME Transactions on Mechatronics, 2021) · cited 34× · AI/ML

**Wikidata**: [openalex:W3131832144](https://www.wikidata.org/wiki/openalex:W3131832144)  
**Source**: https://4ort.xyz/entity/practical-fractional-order-variable-gain-supertwisting-control-with-application-to-wafer-stages-of-photolithography-syst