# Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner

> Research article (Micromachines, 2019) · cited 18× · AI/ML

**Wikidata**: [openalex:W2967564480](https://www.wikidata.org/wiki/openalex:W2967564480)  
**Source**: https://4ort.xyz/entity/positioning-error-analysis-and-control-of-a-piezo-driven-6-dof-micro-positioner