# Polarization parametric indirect microscopic imaging for patterned device line edge inspection

> Research article (Applied Physics B, 2018) · cited 15× · AI/ML

**Wikidata**: [openalex:W2885357224](https://www.wikidata.org/wiki/openalex:W2885357224)  
**Source**: https://4ort.xyz/entity/polarization-parametric-indirect-microscopic-imaging-for-patterned-device-line-edge-inspection