# Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 19× · AI/ML

**Wikidata**: [openalex:W4252323845](https://www.wikidata.org/wiki/openalex:W4252323845)  
**Source**: https://4ort.xyz/entity/planned-maintenance-schedule-update-method-for-predictive-maintenance-of-semiconductor-plasma-etcher