# Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

> Research article (Japanese Journal of Applied Physics, 2019) · cited 13× · AI/ML

**Wikidata**: [openalex:W2965793080](https://www.wikidata.org/wiki/openalex:W2965793080)  
**Source**: https://4ort.xyz/entity/planar-type-mems-tactile-sensor-integrating-micro-macro-detection-function-of-fingertip-to-evaluate-surface-touch-sensat