# Piezoelectric micro dither stage calibration of 6-axis IMU

> Research article (2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2291172409](https://www.wikidata.org/wiki/openalex:W2291172409)  
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