# Perspectives and tradeoffs of absorber materials for high NA EUV lithography

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2020) · cited 43× · AI/ML

**Wikidata**: [openalex:W3091401086](https://www.wikidata.org/wiki/openalex:W3091401086)  
**Source**: https://4ort.xyz/entity/perspectives-and-tradeoffs-of-absorber-materials-for-high-na-euv-lithography