# Performance Optimization of Atomic Layer Deposited HfO<sub>x</sub> Memristor by Annealing With Back-End-of-Line Compatibility

> Research article (IEEE Electron Device Letters, 2022) · cited 15× · AI/ML

**Wikidata**: [openalex:W4285193933](https://www.wikidata.org/wiki/openalex:W4285193933)  
**Source**: https://4ort.xyz/entity/performance-optimization-of-atomic-layer-deposited-hfo-sub-x-sub-memristor-by-annealing-with-back-end-of-line-compatibil