# Performance Evaluation of CNN-Based End-Point Detection Using In-Situ Plasma Etching Data

> Research article (Electronics, 2020) · cited 28× · AI/ML

**Wikidata**: [openalex:W3114560879](https://www.wikidata.org/wiki/openalex:W3114560879)  
**Source**: https://4ort.xyz/entity/performance-evaluation-of-cnn-based-end-point-detection-using-in-situ-plasma-etching-data