# Pattern recognition and data mining techniques to identify factors in wafer processing and control determining overlay error

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 13× · AI/ML

**Wikidata**: [openalex:W2085391882](https://www.wikidata.org/wiki/openalex:W2085391882)  
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