# Pattern defect reduction and LER improvement of chemo-epitaxy DSA process

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2599148851](https://www.wikidata.org/wiki/openalex:W2599148851)  
**Source**: https://4ort.xyz/entity/pattern-defect-reduction-and-ler-improvement-of-chemo-epitaxy-dsa-process