# Path Planning of Randomly Scattering Waypoints for Wafer Probing Based on Deep Attention Mechanism

> Research article (IEEE Transactions on Systems Man and Cybernetics Systems, 2022) · cited 12× · AI/ML

**Wikidata**: [openalex:W4285204191](https://www.wikidata.org/wiki/openalex:W4285204191)  
**Source**: https://4ort.xyz/entity/path-planning-of-randomly-scattering-waypoints-for-wafer-probing-based-on-deep-attention-mechanism