# Particle Tracking of Microelectromechanical System Performance and Reliability

> Research article (Journal of Microelectromechanical Systems, 2018) · cited 11× · AI/ML

**Wikidata**: [openalex:W2810220673](https://www.wikidata.org/wiki/openalex:W2810220673)  
**Source**: https://4ort.xyz/entity/particle-tracking-of-microelectromechanical-system-performance-and-reliability