# Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

> Research article (Journal of vibration and acoustics, 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2530061804](https://www.wikidata.org/wiki/openalex:W2530061804)  
**Source**: https://4ort.xyz/entity/parametrically-excited-electrostatic-mems-cantilever-beam-with-flexible-support
