# Overview of stitching for high NA: imaging and overlay experimental and simulation results

> Research article (Optical and EUV Nanolithography XXXVI, 2023) · cited 17× · AI/ML

**Wikidata**: [openalex:W4367307936](https://www.wikidata.org/wiki/openalex:W4367307936)  
**Source**: https://4ort.xyz/entity/overview-of-stitching-for-high-na-imaging-and-overlay-experimental-and-simulation-results