# Orbitrap™-SIMS analysis of advanced semiconductor inorganic structures

> Research article (Vacuum, 2022) · cited 10× · AI/ML

**Wikidata**: [openalex:W4280519524](https://www.wikidata.org/wiki/openalex:W4280519524)  
**Source**: https://4ort.xyz/entity/orbitraptm-sims-analysis-of-advanced-semiconductor-inorganic-structures