# Optimum ArFi laser bandwidth for 10nm node logic imaging performance

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 14× · AI/ML

**Wikidata**: [openalex:W1996027411](https://www.wikidata.org/wiki/openalex:W1996027411)  
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