# Optimization of three-dimensional traveling wave drive for a PZT thin-film micro-motor based on stiffness tuning of the supporting structure

> Research article (Ultrasonics, 2023) · cited 17× · AI/ML

**Wikidata**: [openalex:W4379209661](https://www.wikidata.org/wiki/openalex:W4379209661)  
**Source**: https://4ort.xyz/entity/optimization-of-three-dimensional-traveling-wave-drive-for-a-pzt-thin-film-micro-motor-based-on-stiffness-tuning-of-the-