# Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach

> Research article (Computers & Chemical Engineering, 2018) · cited 84× · AI/ML

**Wikidata**: [openalex:W2890431580](https://www.wikidata.org/wiki/openalex:W2890431580)  
**Source**: https://4ort.xyz/entity/optimization-and-control-of-a-thin-film-growth-process-a-hybrid-first-principles-artificial-neural-network-based-multisc