# Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets

> Research article (IEEE Transactions on Systems Man and Cybernetics Systems, 2016) · cited 26× · AI/ML

**Wikidata**: [openalex:W2327392319](https://www.wikidata.org/wiki/openalex:W2327392319)  
**Source**: https://4ort.xyz/entity/optimal-one-wafer-cyclic-scheduling-of-time-constrained-hybrid-multicluster-tools-via-petri-nets