# Optical wafer defect inspection at the 10 nm technology node and beyond

> Research article (International Journal of Extreme Manufacturing, 2022) · cited 136× · AI/ML

**Wikidata**: [openalex:W4226283974](https://www.wikidata.org/wiki/openalex:W4226283974)  
**Source**: https://4ort.xyz/entity/optical-wafer-defect-inspection-at-the-10-nm-technology-node-and-beyond