# Optical MEMS devices for compact 3D surface imaging cameras

> Research article (Micro and Nano Systems Letters, 2019) · cited 23× · AI/ML

**Wikidata**: [openalex:W2959060959](https://www.wikidata.org/wiki/openalex:W2959060959)  
**Source**: https://4ort.xyz/entity/optical-mems-devices-for-compact-3d-surface-imaging-cameras
