# On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments

> Research article (Journal of Applied Physics, 2015) · cited 59× · AI/ML

**Wikidata**: [openalex:W1596971376](https://www.wikidata.org/wiki/openalex:W1596971376)  
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